Pilot Lithography Laboratory
Application:
* Wet etching
* lithography of micro and nano structures
* In microelectronics
* In medical engineering
* Semiconductor laboratory
* In physics and nanotechnology
Product Introduction:
The lithography laboratory provides the equipment and devices needed to perform the lithography process. In this way, it is possible to perform processes such as spin coating, prebake, post bake, contact lithography (Exposure), stripping, and even removal and etching.
Technical Specifications:
* Teflon spin coater module installed on the device table (Spin Coater)
* Anti-acid and washable bowl and container for washing excess material
* Fully touch screen with a special pen (stylus) with the possibility of applying a speed profile consisting of 8 sections
* Making the wafer and the workpiece cocenteric with high precision using the aligner
* The possibility of determining the acceleration of increasing or decreasing the speed up to 450 RPM/Sec
* Detergent wastewater outlet
* Inlet to inject gas into the chamber and neutralize the coating chamber
* UV Contact Lithography or exposure module
* Full touch screen with special stylus
* Hotplate system up to 150 degrees
* UV lamp system with a fixed wavelength of 365 nm or 402 nm
* Adjusting the light intensity of the lamps in 10 separate steps
* Heating system and solution temperature control up to 60 degrees Celsius
* Timer to control the heating time of the solution
Advantages:
* Cell temperature display with manual temperature control
* Precise positioning of the wafer on the bottom plate of the glass or talc mask with a completely steel bottom plate.
* The possibility of stopping the exposure process and changing the light intensity in the middle of the process
* Storage tank module and fluid heater
* Anti-acid body completely resistant to solvents
* Suction from the back and top of the cells with the help of a strong fan installed on the top of the device
* Top cell lid to prevent water evaporation of solutions
* Displaying the rotational speed profile online on the device screen along with saving the most used programs and recalling them for use.
* The possibility of controlling the process both manually and automatically up to a rotational speed of 5000 rpm
* Anodized aluminum turntable for -4inch, -6inch wafer and with slide with the requests of costumers
* 1 year warranty
* 5 years after sales service
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Type | This product is a final B2B equipment. |